Top-down approach to fiber-top cantilevers.

Author
Gavan, Khashayar Babaei · Rector, Jan H · Heeck, Kier · Chavan, Dhwajal · Gruca, Grzegorz · Oosterkamp, Tjerk H · Iannuzzi, Davide
Published 2011-08-01
Journal Optics letters
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Abstract

Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device grants mass sensitivity comparable to that reported for similar standard cantilevers. This proof-of-concept paves the way to series production of highly sensitive fiber-top devices for remote detection of biochemical substances.

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Details

Title
Top-down approach to fiber-top cantilevers.
Author
Gavan, Khashayar Babaei · Rector, Jan H · Heeck, Kier · Chavan, Dhwajal · Gruca, Grzegorz · Oosterkamp, Tjerk H · Iannuzzi, Davide
Published
2011-08-01
Year
2011
Journal
Optics letters
Type
Research Article ·
Language
eng
PMID
21808351
Keywords*
Microtechnology · Methods · Optical Fibers

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